Receiving Y .Z. Hsu Outstanding Professor Award recently, Professor Chi-Yuan Lee from the Department of Mechanical Engineering of Yuan Ze University, developed a flexible integrated micro sensor (temperature, humidity, flow, voltage, electric current etc.) by Micro-electro-mechanical Systems. Its advantages include small size and sensing functions for temperature, humidity, flow, voltage and current. It can measure a position flexibly and embed precisely. Not only high accuracy, great sensitivity and quick response, it also provides customized development.